26 May 2014

VRV takes part to market survey on SIEMENS type CVD reactors

VRV has provided data for an overview carried out by Photon International magazine.

VRV has put great effort into reducing the power consumption of its reactors and CVD 96R turned out to consume the least amount of power – 40 kWh per kg of deposited polysilicon whilst the products from the remaining companies operate at 45 kWh per kg. As with other production equipment, productivity is one of the key parameters for evaluating a CVD reactor. Even though there is much debate about how to improve the output, VRV promotes reactors can that process 48 pairs of slim rods and which is still the highest number in the survey.