Polysilicon can be produced by Chemical Vapour Deposition (CVD), mixing Trichlorosilane (SiHCl3) and Hydrogen (H2) in a reactor at extremely high temperature (up to 1150 Celsius degrees) through the deposition of Silicium on a filament run by electric current. VRV has been the leading manufacturer of CVD Reactors and STC Converters for the last 25 years with the supply of more than 400 reactors and has the strongest track record for this type of equipment supplied in the past 5 years to the PolySilicon industry. Over the years, due to the market demand for more efficiency and reduced power consumption in the production of polysilicon, VRV has developed, designed and supplied new reactors with production capacity of over 600 ton per year.
In addition to the equipment, VRV can deliver Process Design Package (PDP), which can be converted into Basic and Detail Design by any qualified EPC contractor.
CVD REACTOR MODELS TYPE
CVD Reactor Expected Performances | U.M. | 36R | 54R | 96R |
Filament length | mm | 2,500 | 2,500 | 2,500 |
Rod diameter | mm | 125 | 142 | 142 |
Deposition rate | kg/h | 39,5 | 67 | ≥ 100 |
Batch weight | kg | 2300 | 4700 | 8300 |
Specific Power Consumption | kWh/kg poly | 65 | ≤ 55 | ≤ 40 |
Cycle time | hours | 80 – 90 | 85 – 95 | 85 – 100 |
Reactor Capacity | MTY | 230 | 400 | ≥ 600 |
The lowest possible polysilicon production cost can be achieved only if each Auxiliary Process Unit, like the STC Converters, can instantly follow the requirements dictated by the CVD Reactors in terms of operating capacity. This is easy to achieve with our 30R STC Converter, a powerful Siemens-type Converter with proven Technology; the operating capacity can be easily adjusted in case of need.
In addition, VRV supplies the Client with drawings and specifications of the graphite internals (heating rods and shields): the Client is free to purchase the graphite internals on the market and is not compelled to purchase them through VRV.
CVD REACTORS – YOUR NEEDS OUR MISSION